Journal of Electrical Engineering and Automation

Ultra-precision machining technology poses higher challenges to the high-precision requirements of modern manufacturing, in which the piezoelectric ceramic micro-feed control system plays a key role in achieving nanometer-level machining accuracy. This paper focuses on the research of control algorithms for piezoelectric ceramic driving devices in ultra-precision machine tools, aiming to improve their dynamic response speed and positioning accuracy. By analyzing the nonlinear characteristics of piezoelectric ceramics, a composite control strategy integrating PID control and feedforward compensation is proposed, and the effectiveness of this method is verified through simulation and experiments. The research shows that the designed control algorithm can significantly reduce hysteresis errors, improve the stability and repeat positioning accuracy of the system, providing theoretical support and technical guarantee for ultra-precision machining.

Ultra-precision machine tool; Piezoelectric ceramic; Micro-feed control; Control algorithm; Nonlinear compensation