International Journal of Mechanical Engineering

Optical quantum sensors, with their advantages of high sensitivity and low drift, show broad application potential in the field of micro-electro-mechanical system (MEMS) vibration monitoring. However, their measurement process is susceptible to environmental noise, mechanical coupling interference, and intrinsic noise, leading to degradation in signal quality. Focusing on improving the signal-to-noise ratio of MEMS vibration monitoring, this paper conducts an in-depth analysis of the characteristics of quantum measurement noise. Combined with the vibration response laws of MEMS structures, it constructs a coherent detection scheme based on quantum entangled light sources, and integrates multi-stage filtering and signal fusion strategies to achieve collaborative suppression of low-frequency background noise and high-frequency random noise. The research shows that this method can effectively improve monitoring accuracy and system stability without increasing the sensor volume and energy consumption, providing reliable technical support for the engineering application of high-precision micro-vibration detection in fields such as aerospace, precision manufacturing, and structural health monitoring.

Optical quantum sensor; MEMS vibration monitoring; Noise suppression; Coherent detection; Multi-stage filtering