Journal of Electrical Engineering and Automation

Due to the high requirements for precision and stability in precision mechatronic systems during semiconductor manufacturing processes, vibration issues have become a key factor affecting processing quality and production efficiency. Vibration suppression technology optimizes precision and stability in the machining process by controlling and reducing system vibrations. This study explores vibration suppression methods for precision mechatronic systems in semiconductor manufacturing, analyzing the impact of different vibration sources and their effects on system performance. Integrating modern vibration control technologies such as active control, passive vibration isolation, and composite suppression techniques, this paper proposes a vibration suppression scheme suitable for the semiconductor manufacturing field. Experimental verification shows that the proposed method effectively improves the working precision and production stability of equipment, with broad application prospects.

Semiconductor manufacturing; Precision mechatronic systems; Vibration suppression; Vibration control; Active control