高原子质量分辨率的桌面级纳米团簇源-物理科学与技术研究-CSCIED科技核心评价数据库-手机版

高原子质量分辨率的桌面级纳米团簇源

Desktop cluster beam source with high atomic precise mass resolution

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DOI	10.12208/j.pstr.20240003
刊名	物理科学与技术研究 Physical Sience and Technical Research
年，卷(期)	2024, 4(1)
作者	辛骅,杜启帆,白伟,韩玉冰,王佳,刘红宇,殷浩华,陆大春*,
作者单位	1 陕西科技大学机电工程学院陕西西安 ; 2 扩维原子有限公司，广东省深圳市鸿创科技中心广东深圳 ;
摘要	本文报告了一种基于磁控溅射、气体冷凝、离子光学和质量选择组合的桌面级纳米团簇制备源，该源能够精确控制纳米团簇的原子数。磁控溅射技术用于气化靶材，可适用于周期表中的65种以上元素，同时也兼容合金和化合物。纳米团簇在液氮冷却环境下，通过氩气和氦气的冷凝作用形成。该团簇源结合离子光学系统和改进的横向多振荡飞行时间质谱仪，能够制备出尺寸范围从2个原子到不少10万个原子的纳米团簇，且保持恒定的质量分辨率(M/dM>30)。通过优化，离子光学系统和质谱仪的尺寸显著减小，使得团簇束源从大型综合设备转变为桌面级紧凑装置，大大降低了制造成本。
Abstract	We report on a desktop source for producing atomic number precise nanocluster based on the combination of magnetron sputtering, gas condensation, ion optics and mass filter. The use of magnetron sputtering to vaporize a target is applicable to more than 65 elements in the periodic table, also compatible with alloys and compounds. Nanoclusters are formed by condensation with Ar and He gases in a liquid nitrogen cooling environment. The source, combined with ion optics and a modified lateral multi-oscillating time-of-flight mass filter, can produce nanoclusters in the size range from 2 up to at least 100,000 atoms with a constant mass resolution (M/dM>30). By optimizing the dimensions of the ion optics and mass filter, the cluster beam source has been significantly downsized, transforming it from a large, comprehensive piece of equipment to a compact desktop device, thereby significantly reducing manufacturing costs.
关键词	磁控溅射；气体冷凝；离子光学；质量选择
KeyWord	Magnetron sputtering; Gas condensation; Ion optics; Quality selection
基金项目
页码	17-23

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引用本文

辛骅,杜启帆,白伟,韩玉冰,王佳,刘红宇,殷浩华,陆大春*. 高原子质量分辨率的桌面级纳米团簇源 [J]. 物理科学与技术研究. 2024; 4; (1). 17 - 23.

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