簇束技术大规模生产纳米团簇的放大原理证明-物理科学与技术研究-CSCIED科技核心评价数据库-手机版

簇束技术大规模生产纳米团簇的放大原理证明

Proof of amplification principle for mass production of nanoclusters by cluster technology

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DOI	10.12208/j.pstr.20240001
刊名	物理科学与技术研究 Physical Sience and Technical Research
年，卷(期)	2024, 4(1)
作者	辛骅,白伟,杜启帆,韩玉冰,王佳,刘红宇,殷浩华,陆大春*,
作者单位	1 陕西科技大学机电工程学院陕西西安 ; 2 扩维原子有限公司，广东省深圳市鸿创科技中心广东深圳 ;
摘要	本文介绍了一种基于团簇束技术的纳米团簇量产设备。该项技术通过对磁控溅射阴极和电源、喷嘴和撇油器、离子光学器件、四弯、差分沉积等各种关键部件进行工程线性放大，从而实现簇束通量的放大。展示了Ag、Cu和Ni纳米团簇的大规模生产（克/小时），具有狭窄的尺寸分布和良好的球形分布。这种方法可以应用于65种元素，也与合金和化合物相容，这为大量无配体纳米团簇的一般合成提供了一条新途径，适用于科学研究、化学、能源、半导体和生物医学等应用。
Abstract	In this paper, a mass production device for nanoclusters based on cluster beam technology is introduced. By engineering linear amplification of various key components such as magnetron sputtering cathode and power supply, nozzles and skimmers, ion optics, four-bend and differential deposition, the amplification of cluster flux is realized. Large-scale production of Ag, Cu and Ni nanoclusters (g/h) with narrow size distribution and good spherical distribution was demonstrated. This method, which can be applied to 65 elements and is also compatible with alloys and compounds, provides a new route for the general synthesis of large numbers of ligand-free nanoclusters for applications such as scientific research, chemistry, energy, semiconductors and biomedicine.
关键词	纳米团簇；磁控溅射；离子光学；质量选择
KeyWord	Nanoclusters; Magnetron sputtering; Ion optics; Quality selection
基金项目
页码	1-6

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辛骅,白伟,杜启帆,韩玉冰,王佳,刘红宇,殷浩华,陆大春*. 簇束技术大规模生产纳米团簇的放大原理证明 [J]. 物理科学与技术研究. 2024; 4; (1). 1 - 6.

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