用于聚焦高通量氩离子束的wehnelt离子透镜设计-物理科学与技术研究-CSCIED科技核心评价数据库-手机版

用于聚焦高通量氩离子束的wehnelt离子透镜设计

Design of wehnelt ion lens for focusing high throughput argon ion beam

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DOI	10.12208/j.pstr.20240005
刊名	物理科学与技术研究 Physical Sience and Technical Research
年，卷(期)	2024, 4(1)
作者	陆大春,刘红宇,蒋衡*,
作者单位	深圳扩维原子科技有限公司广东深圳 ;
摘要	Wehnelt离子透镜是横向压缩离子束的主要技术手段，在获得高分辨、高质量聚焦离子束方面起着关键作用。针对高通量氩离子束的传输与聚焦过程，离子束流传输速率的提升，本文设计了一种用于聚焦高通量氩离子束流的wehnelt离子透镜，并采用SIMION仿真模拟软件对离子的命中区域进行了研究。研究结果表明，通过合理布局透镜结构与电压配置，能够使得72%（2 keV）或65%（5 keV）的离子聚焦在10mm×10 mm的矩形区域，并且99%以上的离子能够聚焦在20 mm×20 mm的矩形区域。
Abstract	Wehnelt ion lenses are commonly used techniques for transversely compressing ion beams, playing a crucial role in achieving high-resolution and high-quality focused ion beams. For the enhancement of ion beam current transmission rate in the transport and focusing process of high-throughput argon ion beams, this study designs a wehnelt ion lens specifically for focusing high-throughput argon ion beams. The ion impact area was investigated using SIMION simulation software. By optimizing the lens structure layout and voltage configuration, it was found that 72% (2 keV) or 65% (5 keV) of ions can be focused within a 10 mm × 10 mm rectangular area, and over 99% of ions can be focused within a 20 mm × 20 mm rectangular area.
关键词	Wehnelt离子透镜；离子束；SIMION；聚焦
KeyWord	Wehnelt Ion lens; Ion beam; SIMION; Focusing
基金项目
页码	28-33

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陆大春,刘红宇,蒋衡*. 用于聚焦高通量氩离子束的wehnelt离子透镜设计 [J]. 物理科学与技术研究. 2024; 4; (1). 28 - 33.

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